To reserve time on a resource, or to view more information about a resource, click on the resource name.
| Dicing/Bonding
|
Bonder, Wedge
|
| Dicing/Bonding
|
Dicing Saws- ADT
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| Dicing/Bonding
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Dicing Saws- Microautomation
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| Dicing/Bonding
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Gold Ball Bonder
|
| Dicing/Bonding
|
Lapper/Polisher
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| Film Deposition
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E-beam Evaporator, Tellmark
|
| Film Deposition
|
E-beam Evaporator, Varian 3 Pocket
|
| Film Deposition
|
PECVD, STS 310PC SiO2 - SiN - Amorphous Si
|
| Film Deposition
|
Sputter Deposition, Cook Vaccum Systems
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| Film Deposition
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Sputter Deposition, KJL CMS-18 Multi-Source
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| Hot Processing
|
Furnace Tube, Tystar #1 Wet and dry Ox
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| Hot Processing
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Furnace Tube, Tystar #2 dry Ox and Annealing
|
| Hot Processing
|
Furnace Tube, Tystar #3 LPDCV Nitride
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| Hot Processing
|
Furnace Tube, Tystar #4 Poly sil and doping
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| Hot Processing
|
RTA, Steag 100CS RTP
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| Hot Processing
|
Wafer Bonder, EVG 501
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| Metrology
|
5 PT Probe Station
|
| Metrology
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Electronic Measurement, Lakeshore 7507 Hall Effect
|
| Metrology
|
Ellipsometer, J.A. Woolam
|
| Metrology
|
Photospectrometer, Filmetrics F40
|
| Metrology
|
Photospectrometer, Nanometrics Nanospec
|
| Metrology
|
Profilometer, Dektak 150
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| Metrology
|
Profilometer, Dektak II A #1
|
| Metrology
|
Profilometer, Dektak II A #2
|
| Metrology
|
Profilometer, Tencor Alpha-Step-200
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| Photolithography
|
E-beam Evaporator, PVD
|
| Photolithography
|
E-Beam Lithography, Raith 150
|
| Photolithography
|
Hotplate, CEE
|
| Photolithography
|
Mask Aligner, EVG Model 620 w/BSA
|
| Photolithography
|
Mask Aligner, Karl Suss MA6
|
| Photolithography
|
Mask Aligner, Karl Suss MJB3
|
| Photolithography
|
Oven, Despatch, Inert Atmosphere
|
| Photolithography
|
Oven, YES, Image Reversal/HMDS
|
| Photolithography
|
Spin Coater, Headway, E-Beam Bay
|
| Photolithography
|
Spin Coater, Headway, Litho Bay
|
| Photolithography
|
Spin Coater, Laurell, E-Beam Bay
|
| Photolithography
|
Spin Coater, Laurell, Litho Bay
|
| Plasma
|
Asher, Anatech Barrel SCE600
|
| Plasma
|
Deep RIE, STS
|
| Plasma
|
RIE/ICP, Unaxis SLR
|
| Unknown
|
Staff Time
|
| Wet Processing
|
Acids and HF Bench
|
| Wet Processing
|
RCA Bench
|
