Cleanroom Facilities
The Class 100-1000 cleanroom facility is a folded bay-and-chase layout on the first floor with 7 research bays, a tool move-in aisle, and a gowning area. The research bays are:
- E-Beam Lithography
- Bio/Nano Biological, Soft Lithography and Medical Research
- Photolithography
- Wet Processing
- Hot processing
- Thin Films Deposition
- Dry Etching
The Bio/Nano bay is specifically designed for bio processing. It has a separate air handling system and is environmentally isolated to avoid cross interaction with the nanofab bays. On the second floor above the cleanroom is the fan deck which houses cleanroom utility and lab process systems.
